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|Title:||A q-switched ruby laser for producing laser-doped contacts to semiconductors|
|Publisher:||Australian Atomic Energy Commission|
|Citation:||Rose, A., & Lawson, E. M. (1982). A q-switched ruby laser for producing laser-doped contacts to semiconductors. (AAEC/E546). Lucas Heights, NSW: Australian Atomic Energy Commission.|
|Abstract:||A description is given of a q-switched ruby laser used for producing laser-doped contacts on semiconductors.Homogenisation of the laser beam and measurement of the output energy are discussed and some attention is given to the problems of sample reflectivity. A brief outline of the laser-doping process is provided, together with recent experimental results and details relating to the production and analysis of the contacts. A preliminary result of defect characteristics after laser irradiation of germanium is also presented.|
|Gov't Doc #:||101|
|Appears in Collections:||Scientific and Technical Reports|
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